GB/T 41064-2021表面化学分析深度剖析用单层和多层薄膜测定X射线光电子能谱、俄歇电子能谱和二次离子质谱中深度剖析溅射速率的方法标准
英文:Surface chemical analysis—Depth profiling—Method for sputter rate determination in X-ray photoelectron spectroscopy, ...
英文:Surface chemical analysis—Depth profiling—Method for sputter rate determination in X-ray photoelectron spectroscopy, ...