GB/T 34894-2017微机电系统(MEMS)技术基于光学干涉的MEMS微结构应变梯度测量方法国家标准
英文:Micro-electromechanical system technology—Measuring method for strain gradient measurements of MEMS microstructures u...
英文:Micro-electromechanical system technology—Measuring method for strain gradient measurements of MEMS microstructures u...