GB/T 32814-2016硅基MEMS制造技术基于SOI硅片的MEMS工艺规范国家标准
英文:Silicon-based MEMS fabrication technology—Specification for criterion of the SOI wafer based MEMS process GB/T 32814-...
英文:Silicon-based MEMS fabrication technology—Specification for criterion of the SOI wafer based MEMS process GB/T 32814-...