GB/T 32814-2016硅基MEMS制造技术基于SOI硅片的MEMS工艺规范国家标准
英文:Silicon-based MEMS fabrication technology—Specification for criterion of the SOI wafer based MEMS process GB/T 32814-...
英文:Silicon-based MEMS fabrication technology—Specification for criterion of the SOI wafer based MEMS process GB/T 32814-...
英文:Silicon-based MEMS fabrication technology—Specification for criterion of the bulk silicon piezoresistance process GB/...
英文:Silicon-based MEMS fabrication technology—Specification for criterion of the combination of the deep etching and bond...
英文:Nanotechnologies—Electrical operating parameter test specification of wafer level nano-scale phase change memory cell...
英文:Test methods of the performance for MEMS high g accelerometer GB/T 33929-2017介绍: 国家标准《MEMS高g值加速度传感器性能试验方法》由TC336(全国微机...
英文:Wafer level test methods for MEMS piezoresistive pressure-sensitive die performances GB/T 33922-2017介绍: 国家标准《MEMS压阻式压...
英文:Micro-electromechanical system technology—Measuring method for residual strain measurements of MEMS microstructures u...
英文:Micro-electromechanical system technology—Measuring method for strain gradient measurements of MEMS microstructures u...
英文:Micro electromechanical system technology—Test method for the nonlinear vibration of the MEMS resonant sensitive elem...
英文:Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures u...