GB/T 43313-2023碳化硅抛光片表面质量和微管密度的测试共焦点微分干涉法国家标准
英文:Test method for surface quality and micropipe density of polished silicon carbide wafers—Confocal and differential in...
英文:Test method for surface quality and micropipe density of polished silicon carbide wafers—Confocal and differential in...