GB/T 42158-2023微机电系统(MEMS)技术微沟槽和棱锥式针结构的描述和测量方法国家标准
英文:Micro-electromechanical systems technology(MEMS) —Description and measurement methods for micro trench and pyramidal ...
英文:Micro-electromechanical systems technology(MEMS) —Description and measurement methods for micro trench and pyramidal ...