GB/T 34893-2017微机电系统(MEMS)技术基于光学干涉的MEMS微结构面内长度测量方法国家标准
英文:Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures u...
英文:Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures u...