GB/T 34900-2017微机电系统(MEMS)技术基于光学干涉的MEMS微结构残余应变测量方法国家标准
英文:Micro-electromechanical system technology—Measuring method for residual strain measurements of MEMS microstructures u...
英文:Micro-electromechanical system technology—Measuring method for residual strain measurements of MEMS microstructures u...