GB/T 32816-2016硅基MEMS制造技术以深刻蚀与键合为核心的工艺集成规范国家标准
英文:Silicon-based MEMS fabrication technology—Specification for criterion of the combination of the deep etching and bond...
英文:Silicon-based MEMS fabrication technology—Specification for criterion of the combination of the deep etching and bond...