GB/T 24581-2022硅单晶中III、V族杂质含量的测定低温傅立叶变换红外光谱法标准
英文:Test method for Ⅲ and Ⅴ impurities content in single crystal silicon—Low temperature FT-IR analysis method GB/T 24581...
英文:Test method for Ⅲ and Ⅴ impurities content in single crystal silicon—Low temperature FT-IR analysis method GB/T 24581...