GB/T 38614-2020基于柔性铰链机构和压电陶瓷驱动器的纳米定位与扫描平台测量方法标准
英文:Measuring method for nano positioning and scanning stage based on flexible hinge mechanism and piezo actuator GB/T 38...
英文:Measuring method for nano positioning and scanning stage based on flexible hinge mechanism and piezo actuator GB/T 38...