GB/T 10067.416-2019电热和电磁处理装置基本技术条件第416部分:多晶硅铸锭炉国家标准
英文:Basic specifications for electroheating and electromagnetic processing installations—Part 416: Polysilicon ingot furn...
英文:Basic specifications for electroheating and electromagnetic processing installations—Part 416: Polysilicon ingot furn...