GB/T 37049-2018电子级多晶硅中基体金属杂质含量的测定电感耦合等离子体质谱法国家标准
英文:Test method for the content of metal impurity in electronic grade polysilicon—Inductively coupled-plasma mass spectro...
英文:Test method for the content of metal impurity in electronic grade polysilicon—Inductively coupled-plasma mass spectro...